Study on the relationship between motion accuracy and optical surface accuracy of ion beam figuring equipment

Yongbin Wang; Yifan Dai; Hao Hu; Zhe Zeng; Guangqi Zhou

doi:10.1117/12.2604878

15 February 2022 Study on the relationship between motion accuracy and optical surface accuracy of ion beam figuring equipment

Yongbin Wang, Yifan Dai, Hao Hu, Zhe Zeng, Guangqi Zhou

Author Affiliations +

Proceedings Volume 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021); 1216603 (2022) https://doi.org/10.1117/12.2604878
Event: Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 2021, Hong Kong, Hong Kong

Abstract

Ion beam figuring has the advantages of non-contact, high certainty, and removal function’s long-term stability. It is the primary processing method of ultra-high precision optical elements such as lithography objective lens. In general, the IBF process does not require high motion precision of the moving mechanism. However, when the shape of the optical components changes from a plane to a curved surface and the RMS value of the surface accuracy is better than 0.3nm, the influence of the motion accuracy cannot be ignored. The paper focuses on the influence mechanism of IBF equipment’s motion accuracy on the shape of removal function, removal rate, and other essential parameters under the three-axis figuring mode of curved surface elements. We have discussed the sub-nanometer precision generation requirements of curved elements for removal function positioning accuracy and motion accuracy of polishing equipment. The feasibility of ion beam triaxial machining for the sub-nanometer precision generation of curved optical elements is demonstrated by analysis and calculation. The results show that under the condition of ensuring the micron motion accuracy, the three-axis ion beam figuring equipment can also process the curved surface’s surface to the ultra-high precision that the RMS value is better than 0.3nm. Still, it is difficult to achieve the machining goal only by improving the motion precision of the machine tool’s motion axis, so it is necessary to control the components’ initial profile error.

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Yongbin Wang, Yifan Dai, Hao Hu, Zhe Zeng, and Guangqi Zhou "Study on the relationship between motion accuracy and optical surface accuracy of ion beam figuring equipment", Proc. SPIE 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 1216603 (15 February 2022); https://doi.org/10.1117/12.2604878

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KEYWORDS

Error analysis

Ion beams

Spherical lenses

Ion beam finishing

Optical components

Shape analysis

Defense technologies

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