Phase-shift digital holographic three-dimensional measurement technology based on gray-level encoded

Bingcai Liu; Xiaotong Qian; Ailing Tian; Hongjun Wang; Rui Niu; Zhuzhu Ren

doi:10.1117/12.2623996

27 March 2022 Phase-shift digital holographic three-dimensional measurement technology based on gray-level encoded

Bingcai Liu, Xiaotong Qian, Ailing Tian, Hongjun Wang, Rui Niu, Zhuzhu Ren

Proceedings Volume 12169, Eighth Symposium on Novel Photoelectronic Detection Technology and Applications; 1216946 (2022) https://doi.org/10.1117/12.2623996
Event: Eighth Symposium on Novel Photoelectronic Detection Technology and Applications, 2021, Kunming, China

Abstract

To improve the stability and measurement accuracy of the phase-shift digital holographic measurement system, a gray-level encoded phase-shift digital holographic three-dimensional measurement technology is proposed. This method uses the electronically controlled birefringence effect of the liquid crystal cell to design the gray code, converts the 0-255 gray value into an 8bit digital binary code signal and inputs it to the liquid crystal cell for electrical addressing, so that the refractive index in the liquid crystal cell is changed to achieve digital control of the modulation phase of the reference optical path. a Mach-Zehnder-type phase-shift digital holographic measurement system is designed, and a micro-lens array, with a diameter of 150μm and a sagittal height of 2.6μm is adopted as sample, through phase reconstruction and phase distortion compensation, The phase distribution of the micro-lens array is accurately obtained. The experimental results show that the relative measurement error of the micro-lens array diameter is 2.8%, and the relative measurement error of the sag height is 3.4%, which prove that the proposed method can realize the surface topography measurement of three-dimensional objects effectively.

Citation Download Citation

Bingcai Liu, Xiaotong Qian, Ailing Tian, Hongjun Wang, Rui Niu, and Zhuzhu Ren "Phase-shift digital holographic three-dimensional measurement technology based on gray-level encoded", Proc. SPIE 12169, Eighth Symposium on Novel Photoelectronic Detection Technology and Applications, 1216946 (27 March 2022); https://doi.org/10.1117/12.2623996

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KEYWORDS

Digital holography

Phase shifts

Liquid crystals

Spatial light modulators

Holograms

Modulation

Reconstruction algorithms

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