Large etendue laser beam steering by 2D MEMS resonant mirror and digital micromirror device for time-of-flight lidar and AR display

Viveka Bhupasamudram Raghu; Xianyue Deng; Eunmo Kang; Chin-I Tang; Yuzuru Takashima

doi:10.1117/12.2635132

30 September 2022 Large etendue laser beam steering by 2D MEMS resonant mirror and digital micromirror device for time-of-flight lidar and AR display

Viveka Bhupasamudram Raghu, Xianyue Deng, Eunmo Kang, Chin-I Tang, Yuzuru Takashima

Author Affiliations +

Proceedings Volume 12231, ODS 2022: Industrial Optical Devices and Systems; 122310E (2022) https://doi.org/10.1117/12.2635132
Event: SPIE Optical Engineering + Applications, 2022, San Diego, California, United States

Abstract

Resonant MEMS mirror has been recognized as one of the solid-state laser beam steering (LBS) solutions for AR display and lidar. Such MEMS resonant mirrors’ large angular throw achieves over tens of degrees in scanning field of view (FOV) with operation speed exceeding tens of kHz in resonant frequency. In LBS, beam area is critical especially for lidar to access targets located at a far distance. Having both a large angular throw and beam area, or large Etendue, it is feasible to simultaneously satisfy requirement. For Time of Flight (ToF) lidar transmitter, we proposed and experimentally characterized a large Etendue LBS architecture employing a 2-dimensional MEMS mirror and diffractive LBS by Digital Micromirror Device (DMD). The beam area of MEMS resonant mirror is matched to DMD with relay optics while DMD diffractively increases the Etendue by factor of 5, which is equal to the number of diffraction orders supported by DMD. Along with beam steering, we address laser pulses’ timing to MEMS mirror’s movement to enable raster scanning that eliminates re-sorting of ToF data required for LBS employing a Lissajous pattern.

Conference Presentation

Citation Download Citation

Viveka Bhupasamudram Raghu, Xianyue Deng, Eunmo Kang, Chin-I Tang, and Yuzuru Takashima "Large etendue laser beam steering by 2D MEMS resonant mirror and digital micromirror device for time-of-flight lidar and AR display", Proc. SPIE 12231, ODS 2022: Industrial Optical Devices and Systems, 122310E (30 September 2022); https://doi.org/10.1117/12.2635132

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available