Presentation
9 March 2023 Industrial-grade high-harmonic generation
Author Affiliations +
Proceedings Volume 12400, Fiber Lasers XX: Technology and Systems; 1240015 (2023) https://doi.org/10.1117/12.2649517
Event: SPIE LASE, 2023, San Francisco, California, United States
Abstract
We present a HHG-based XUV source providing large photon flux across a wide range between 40 eV and 150 eV. It is driven by an industrial-grade TruMicro 2030 20-W average power laser system delivering up to 100 µJ at <400-fs pulse duration. A post-compression unit is part of the device to shorten the pulses to approx. 40 fs at only 10% average power loss. The turnkey source provides photon flux of >10^10 photons/s near 70 eV.
Conference Presentation
© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christian Grebing, Maxim Tschernajew, Evgeny Shestaev, Christian Gaida, Sven Breitkopf, Oliver Herrfurth, Tino Eidam, and Jens Limpert "Industrial-grade high-harmonic generation", Proc. SPIE 12400, Fiber Lasers XX: Technology and Systems, 1240015 (9 March 2023); https://doi.org/10.1117/12.2649517
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KEYWORDS
Extreme ultraviolet

Coherence imaging

Pulsed laser operation

Imaging spectroscopy

Laser systems engineering

Metrology

Semiconductors

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