Detection of defective areas and hidden weak patterns in the wafer using massive measurement data

DongHoon Kim; Sungyoon Ryu; Sunhong Jun; Heeyoon Han; Wonjun Choi; Yong-Ju Jeon; Hyun Lee; Souk Kim; Younghoon Sohn

doi:10.1117/12.2657064

27 April 2023 Detection of defective areas and hidden weak patterns in the wafer using massive measurement data

DongHoon Kim, Sungyoon Ryu, Sunhong Jun, Heeyoon Han, Wonjun Choi, Yong-Ju Jeon, Hyun Lee, Souk Kim, Younghoon Sohn

Proceedings Volume 12496, Metrology, Inspection, and Process Control XXXVII; 124961Y (2023) https://doi.org/10.1117/12.2657064
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Abstract

As the measurability (sampling capacity, measurement coverage, and measurement speed) of metrology systems are being enhanced to keep pace with the evolution of semiconductor manufacturing processes, the detection of defective areas and hidden weak patterns by analyzing the massive measurement data is becoming significantly important. In this study, we propose new methods to detect defective areas and hidden weak patterns by mathematically processing massive measurement data. By applying the methods we propose, we were able to successfully detect the hidden weak signals of the millimeter scale in the wafer.

Conference Presentation

Citation Download Citation

DongHoon Kim, Sungyoon Ryu, Sunhong Jun, Heeyoon Han, Wonjun Choi, Yong-Ju Jeon, Hyun Lee, Souk Kim, and Younghoon Sohn "Detection of defective areas and hidden weak patterns in the wafer using massive measurement data", Proc. SPIE 12496, Metrology, Inspection, and Process Control XXXVII, 124961Y (27 April 2023); https://doi.org/10.1117/12.2657064

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available