Manipulation of polymer solubility: crosslinking, thermal activation and variable-temperature bakes

Jacob Sitterly; Justin Nhan; Robert L. Brainard

doi:10.1117/12.2659165

30 April 2023 Manipulation of polymer solubility: crosslinking, thermal activation and variable-temperature bakes

Jacob Sitterly, Justin Nhan, Robert L. Brainard

Author Affiliations +

Proceedings Volume 12498, Advances in Patterning Materials and Processes XL; 124981X (2023) https://doi.org/10.1117/12.2659165
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Conference Poster

Abstract

We describe two studies that examine how the enhancement and suppression of the solubility of a 193-nm positive-tone photoresist can be manipulated using crosslinking, thermal-activation and variable-temperature bakes. In our first study, we describe the development of a thin, polymeric film that can transition through three solubility regimes as a response to increasing bake temperatures: (1) low temperature, developer insoluble; (2) medium temperature, developer soluble; (3) high temperature, developer insoluble.

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Jacob Sitterly, Justin Nhan, and Robert L. Brainard "Manipulation of polymer solubility: crosslinking, thermal activation and variable-temperature bakes", Proc. SPIE 12498, Advances in Patterning Materials and Processes XL, 124981X (30 April 2023); https://doi.org/10.1117/12.2659165

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