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23 January 2023 Fast waveguide geometry extraction using an optical measurement method
Jiyao Yu, Bowen Li, Yu Li, Guowei Cao, Junbo Feng
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Proceedings Volume 12556, AOPC 2022: Optoelectronics and Nanophotonics; 125560I (2023) https://doi.org/10.1117/12.2645404
Event: Applied Optics and Photonics China 2022 (AOPC2022), 2022, Beijing, China
Abstract
A kind of waveguide geometry extraction method based on optical measurements was proposed. By designing two Mach-Zehnder interferometers (MZIs) with different arm lengths, the width and height of the physical geometry of fabricated waveguides could be accurately extracted with the help of MZIs’ optical measured spectrum results. The extracted results on the CUMEC multi-project wafer service (MPW) showed that the mean width and height of the fabricated waveguide were 463.46 nm and 213.58 nm, respectively, while their standard deviation values were 3.82nmand 2.13 nm, respectively.
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Jiyao Yu, Bowen Li, Yu Li, Guowei Cao, and Junbo Feng "Fast waveguide geometry extraction using an optical measurement method", Proc. SPIE 12556, AOPC 2022: Optoelectronics and Nanophotonics, 125560I (23 January 2023); https://doi.org/10.1117/12.2645404
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KEYWORDS
Waveguides
Optical fabrication
Photonics
Wafer testing
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