Correlative microscopy using SEM based nano-CT

Jonas Fell; Fabian Lutter; Christoph Pauly; Michael Engstler; Feng Han; Rémi Costa; Simon Zabler; Michael Maisl; Frank Mücklich; Randolf Hanke; Hans-Georg Herrmann

doi:10.1117/12.2677235

5 October 2023 Correlative microscopy using SEM based nano-CT

Jonas Fell, Fabian Lutter, Christoph Pauly, Michael Engstler, Feng Han, Rémi Costa, Simon Zabler, Michael Maisl, Frank Mücklich, Randolf Hanke, Hans-Georg Herrmann

Author Affiliations +

Proceedings Volume 12698, X-Ray Nanoimaging: Instruments and Methods VI; 1269805 (2023) https://doi.org/10.1117/12.2677235
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States

Abstract

Besides electron imaging in Scanning Electron Microscopy (SEM), techniques like Energy Dispersive X-ray spectroscopy (EDX) or Electron Backscatter Diffraction (EBSD) are widely established. With integration of a target holder and a pixelated x-ray detector, x-ray Computed Tomography (CT) in SEM can be realized and extends the modalities of materials characterization in one instrument. For nano-CT mode, an electron beam is focused on a suitable target leading to x-ray emission. While passing through a specimen, x-rays are differently attenuated depending on their material properties and detected by a direct converting x-ray detector afterward. Presented is a SEM-based nano-CT called XRM-II nanoCT and different applications of correlative microscopy using electron imaging, energy dispersive x-ray spectroscopy and CT. Besides multiscale investigation on materials for fuel cells and electrolysers by 3D visualization with micro- and nano-CT, nano-CT characterization of a catalytic converter with additional chemical analysis is depicted. At last, time-resolved imaging of morphology changes in an annealed Al alloy using nano-CT is presented. Results show grain coarsening as well as precipitations in the range of 200 – 1200 nm.

Conference Presentation

Citation Download Citation

Jonas Fell, Fabian Lutter, Christoph Pauly, Michael Engstler, Feng Han, Rémi Costa, Simon Zabler, Michael Maisl, Frank Mücklich, Randolf Hanke, and Hans-Georg Herrmann "Correlative microscopy using SEM based nano-CT", Proc. SPIE 12698, X-Ray Nanoimaging: Instruments and Methods VI, 1269805 (5 October 2023); https://doi.org/10.1117/12.2677235

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