Research and optimization of electronic charge phenomena on CDSEM imaging of binary photomask

Jiaying Luo; Irene Shi; Brian Zheng; Yuming Gan; Zhuowei Zhang; Tony Ge; Eric Guo

doi:10.1117/12.2684538

21 November 2023 Research and optimization of electronic charge phenomena on CDSEM imaging of binary photomask

Jiaying Luo, Irene Shi, Brian Zheng, Yuming Gan, Zhuowei Zhang, Tony Ge, Eric Guo

Proceedings Volume 12751, Photomask Technology 2023; 1275110 (2023) https://doi.org/10.1117/12.2684538
Event: SPIE Photomask Technology + EUV Lithography, 2023, Monterey, California, United States

Conference Poster

Abstract

CD-SEM is widely used to determine photomask CD performance, SEM image accuracy is crucial for CD measurement. SEM image blurring caused by charging on a type of binary photomask is a major issue we encounter during manufacturing, not only the image form is not clear on Isolated Clear patterns, also obvious CD deviation is observed on Isolated Dark patterns. We investigate into this issue and search for methods to remove residual charge on photomask. We found that these residual charge cannot be removed by electrolyte solutions in cleaning process but will disappear after a few days in fabrication environment. Furthermore, we found these phenomena reappear after UV radiation in close distance or O₂ plasma sputtering on the photomask. In this research, we prove that sputtering a mixture gases plasma can effectively eliminate this phenomenon without any negative impact on the binary photomask itself.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Jiaying Luo, Irene Shi, Brian Zheng, Yuming Gan, Zhuowei Zhang, Tony Ge, and Eric Guo "Research and optimization of electronic charge phenomena on CDSEM imaging of binary photomask", Proc. SPIE 12751, Photomask Technology 2023, 1275110 (21 November 2023); https://doi.org/10.1117/12.2684538

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available