Large bandwidth and high efficiency silicon nitride grating coupler with bottom reflector

Haihong Chen; Weilun Zhang; Yang Chen; Mengyuan Ye; Yu Yu

doi:10.1117/12.2690541

17 August 2023 Large bandwidth and high efficiency silicon nitride grating coupler with bottom reflector

Haihong Chen, Weilun Zhang, Yang Chen, Mengyuan Ye, Yu Yu

Proceedings Volume 12757, 3rd International Conference on Laser, Optics, and Optoelectronic Technology (LOPET 2023); 127571S (2023) https://doi.org/10.1117/12.2690541
Event: 3rd International Conference on Laser, Optics and Optoelectronic Technology (LOPET 2023), 2023, Kunming, China

Abstract

Grating coupler, one of the essential devices in silicon-based optical integrated chip, is still suffering with low coupling efficiency and small operation bandwidth. In this paper, we design and experimentally demonstrate a silicon nitride (Si₃N₄) grating coupler with high coupling efficiency and large bandwidth. Instead of using bottom distributed Bragg reflector, metal mirror or other complex designs, a bottom silicon grating reflector based on a 220 nm industrially standard silicon-on-insulator wafer is employed to improve coupling efficiency and simplify the fabrication processes. The interlayer coupler enables the light transmission between Si3N4 and Si waveguides. By optimizing structure parameters and apodizing the Si3N4 grating coupler, a high coupling efficiency of -2.37 dB and large 1-dB bandwidth of 53 nm are obtained.

Citation Download Citation

Haihong Chen, Weilun Zhang, Yang Chen, Mengyuan Ye, and Yu Yu "Large bandwidth and high efficiency silicon nitride grating coupler with bottom reflector", Proc. SPIE 12757, 3rd International Conference on Laser, Optics, and Optoelectronic Technology (LOPET 2023), 127571S (17 August 2023); https://doi.org/10.1117/12.2690541

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KEYWORDS

Silicon

Optical gratings

Teeth

Reflectors

Silicon nitride

Design and modelling

Fabrication

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