Image reversal of positive photoresist

Russell Morgan

doi:10.1117/12.3011902

12 October 2023 Image reversal of positive photoresist

Russell Morgan

Author Affiliations +

Proceedings Volume 12809, Bay Area Chrome Users Society Symposium 1985; 128090G (2023) https://doi.org/10.1117/12.3011902
Event: 5th Annual BACUS Symposium, 1985, Sunnyvale, CA, United States

Abstract

The first reports of this phenomena that I found was from about I960. In 1978 in one of the references that you'll find in the printed version of this, are some patents on some amine containing salts. These salts, when doped into positive resist, produce image reversal from positive to negative when it was exposed. In 1982 a paper given by a group at IBM at one of the Kodak Interface Symposiums talked about this in detail, trying to demonstrate what they thought the mechanism was of how this miraculous phenomenon worked.

Citation Download Citation

Russell Morgan "Image reversal of positive photoresist", Proc. SPIE 12809, Bay Area Chrome Users Society Symposium 1985, 128090G (12 October 2023); https://doi.org/10.1117/12.3011902

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