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I am grateful to the BACUS organization for this opportunity to talk about the use of a personal computer tor process control. We are living in an information society and this paper deals with getting the right information at the right time. Having been educated as an engineer, I still believe that for every problem there is a solution — so long as we have all the data we need. In a mask shop, or for that matter, any operation, the data we need to improve the operation efficiency is right there before our eyes. The difference between companies that do improve and the ones that do not is usually the accessibility of information and the application of the information received. Keeping this point in mind, I would like to now discuss the use of a personal computer for process control and for generating greater revenues. At Master Images, we have been using a personal computer for tracking critical dimensions, registration and defect density by customer, product, exposure system, material, process, mask field, time, inspection systems and operators involved with producing the photomasks. All data are stored in a Symphony data base with data validation check. All calculations are done automatically on Symphony spreadsheet. The computer we use is an IBM PC. An operator with no previous computer knowledge can be trained in approximately one hour to enter data and generate a comprehensive twelve-page quality report. Today I have brought with me a few slides that show some of the benefits of using a personal computer to track photomask quality.
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