Fabrication and patterning of Tl-Ca-Ba-Cu-O superconducting thin films on LaAlO3 substrates

Gurunathan Subramanyam; Farhad Radpour; Vikram J. Kapoor; George H. Lemon

doi:10.1117/12.20891

1 October 1990 Fabrication and patterning of Tl-Ca-Ba-Cu-O superconducting thin films on LaAlO3 substrates

Gurunathan Subramanyam, Farhad Radpour, Vikram J. Kapoor, George H. Lemon

Author Affiliations +

Proceedings Volume 1287, High Tc Superconductivity: Thin Films and Applications; (1990) https://doi.org/10.1117/12.20891
Event: Advances in Semiconductors and Superconductors: Physics Toward Devices Applications, 1990, San Diego, CA, United States

Abstract

High critical transition temperature (high Tc) superconducting thin films of Tl-Ca-Ba-Cu-O (TlCaBaCuO) were fabricated on LaAlO3 substrates in an rf magnetron sputtering system. As-deposited thin films were sintered and annealed in a thallium rich ambient to obtain superconductivity with a zero resistance critical temperature (Tc) at 103 K. X-ray diffraction (XRD) results showed that the thin films were highly c-axis oriented with both Tl2Ca2Ba2Cu3O (2223) and Tl2CalBa2Cu2Ox (2122) phases present. A wet chemical etching process was used for patterning the as-deposited TlCaBaCuO thin films. Linewidths as small as 25 m were patterned using standard photolithography and wet chemical etching techniques. A ring resonator designed for a center frequency of 30 GHz has been fabricated.

Citation Download Citation

Gurunathan Subramanyam, Farhad Radpour, Vikram J. Kapoor, and George H. Lemon "Fabrication and patterning of Tl-Ca-Ba-Cu-O superconducting thin films on LaAlO3 substrates", Proc. SPIE 1287, High Tc Superconductivity: Thin Films and Applications, (1 October 1990); https://doi.org/10.1117/12.20891

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