High-efficiency off-chip grating couplers for silicon nitride photonics

Radovan Korček; William Fraser; Quentin Wilmart; David Medina Quiroz; Jan Litvik; Lukáš Žúbor; Tomáš Krehel; Samson Edmond; Maziyar Milanizadeh; Jens H. Schmid; Pavel Cheben; Winnie N. Ye; Laurent Vivien; Carlos Alonso-Ramos; Daniel Benedikovic

doi:10.1117/12.3002214

12 March 2024 High-efficiency off-chip grating couplers for silicon nitride photonics

Radovan Korček, William Fraser, Quentin Wilmart, David Medina Quiroz, Jan Litvik, Lukáš Žúbor, Tomáš Krehel, Samson Edmond, Maziyar Milanizadeh, Jens H. Schmid, Pavel Cheben, Winnie N. Ye, Laurent Vivien, Carlos Alonso-Ramos, Daniel Benedikovic

Author Affiliations +

Proceedings Volume 12889, Integrated Optics: Devices, Materials, and Technologies XXVIII; 1288909 (2024) https://doi.org/10.1117/12.3002214
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

Silicon nitride (S_i3N₄) is a leading platform in integrated photonics, providing unique passive functionalities, while maintaining compatibility with complementary metal-oxide-semiconductor processes and scalable and low-cost high-volume production. However, the moderate index contrast of the S_i3N₄ platform makes it difficult to implement efficient vertical surface grating couplers. In this work, we present efficient and robust fiber-chip grating couplers on native and hybrid S_i3N₄ platforms. Minimum coupling losses between -5 dB and -3 dB were measured for single-etch fabricated devices near 1.55 μm wavelength. Moreover, by leveraging the amorphous-silicon overlay on top of the S_i3N₄ platform, we develop hybrid single-etch grating couplers, with a coupling loss approaching 1 dB. The demonstrated grating couplers are promising for SiN integrated photonics, enabling a rapid and cost-effective chip interfacing with standard optical fibers. This opens up novel opportunities for rising applications, including optical communications, nonlinear optics, or quantum information sciences.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Radovan Korček, William Fraser, Quentin Wilmart, David Medina Quiroz, Jan Litvik, Lukáš Žúbor, Tomáš Krehel, Samson Edmond, Maziyar Milanizadeh, Jens H. Schmid, Pavel Cheben, Winnie N. Ye, Laurent Vivien, Carlos Alonso-Ramos, and Daniel Benedikovic "High-efficiency off-chip grating couplers for silicon nitride photonics", Proc. SPIE 12889, Integrated Optics: Devices, Materials, and Technologies XXVIII, 1288909 (12 March 2024); https://doi.org/10.1117/12.3002214

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