Quasi-BIC resonance in TiO2 metasurface for emission enhancement of two-dimensional material

Athira Kuppadakkath; Angela Barreda; Muyi Yang; Ayesheh Bashiri; Seung Heon Han; Tobias Bucher; Adriana Szeghalmi; Audrey Turchanin; Antony George; Thomas Pertsch; Duk-Yong Choi; Isabelle Staude; Falk Eilenberger

doi:10.1117/12.3003130

13 March 2024 Quasi-BIC resonance in TiO₂ metasurface for emission enhancement of two-dimensional material

Athira Kuppadakkath, Angela Barreda, Muyi Yang, Ayesheh Bashiri, Seung Heon Han, Tobias Bucher, Adriana Szeghalmi, Audrey Turchanin, Antony George, Thomas Pertsch, Duk-Yong Choi, Isabelle Staude, Falk Eilenberger

Author Affiliations +

Proceedings Volume 12896, Photonic and Phononic Properties of Engineered Nanostructures XIV; 128960C (2024) https://doi.org/10.1117/12.3003130
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

Bound states in the continuum (BICs) are a category of localized states that exist within the continuum of radiating modes. The high Q-factor exhibited by these states makes quasi-BICs interesting for enhancing the emission from quantum emitters. Quasi-BICs have been experimentally realized in silicon for applications in the infrared wavelength range. Instead of silicon, hydrogenated amorphous silicon (a-Si:H) has been used for achieving quasi-BIC resonance in parts of visible spectra. Titanium dioxide (TiO₂) has emerged as an alternate material for fabricating dielectric metasurfaces with high Q-factor in the visible spectral range due to its lower absorptive losses and high refractive index. However, the fabrication process for TiO₂ nanostructures presents challenges compared to the well-established fabrication processes in silicon. Our work focuses on the design and fabrication of TiO₂ metasurfaces supporting a quasi-BIC mode around 795 nm, with a theoretical Q-factor of 353. Experimental results reveal a maximum Q-factor of 258 at 791 nm. We discuss encountered fabrication constraints and explore possibilities for improvement in both design and fabrication processes. This study contributes to the understanding of quasi-BIC resonance in TiO₂ metasurfaces, and opens avenues for further exploration in the utilization of TiO₂ for high-Q dielectric metasurfaces, offering insights into the design and optimization of these structures.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

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Athira Kuppadakkath, Angela Barreda, Muyi Yang, Ayesheh Bashiri, Seung Heon Han, Tobias Bucher, Adriana Szeghalmi, Audrey Turchanin, Antony George, Thomas Pertsch, Duk-Yong Choi, Isabelle Staude, and Falk Eilenberger "Quasi-BIC resonance in TiO₂ metasurface for emission enhancement of two-dimensional material", Proc. SPIE 12896, Photonic and Phononic Properties of Engineered Nanostructures XIV, 128960C (13 March 2024); https://doi.org/10.1117/12.3003130

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