Theoretical study of multi-gas sensing chip using backward interference Si3N4 microcavity Kerr comb

Gangyun Guan; Anqi Liu; Mingquan Pi; Chuantao Zheng; Kaiyuan Zheng; Bingjie Zhu; Xuyang Wu; Yue Yang; Jie Zheng; Yiding Wang; Frank K. Tittel

doi:10.1117/12.3008061

24 November 2023 Theoretical study of multi-gas sensing chip using backward interference Si₃N₄ microcavity Kerr comb

Gangyun Guan, Anqi Liu, Mingquan Pi, Chuantao Zheng, Kaiyuan Zheng, Bingjie Zhu, Xuyang Wu, Yue Yang, Jie Zheng, Yiding Wang, Frank K. Tittel

Author Affiliations +

Proceedings Volume 12935, Fourteenth International Conference on Information Optics and Photonics (CIOP 2023); 129354N (2023) https://doi.org/10.1117/12.3008061
Event: Fourteenth International Conference on Information Optics and Photonics (CIOP 2023), 2023, Xi’an, China

Abstract

Here, we present an innovative integrated near-infrared Kerr comb sensor chip designed for the simultaneous detection of multi-gas. This sensor is comprised of a microcavity featuring a feedback arm for backward coupling and a compact air-slotted sensing element. The microcavity used to form the optical comb has a symmetric dual-spiral structure with an ultra-high resolution of the absorbance spectrum and a roundtrip length of roughly 1.46 μm, which corresponds to a low repetition frequency of about 9.82 GHz. Through the application of horizontal single-slotted structured silicon nitride (Si₃N₄) waveguides, optimized dispersion engineering of the microcavity can be achieved, resulting in spectra with an octave-spanning bandwidth. The sensing element employs a large-length waveguide, instead of a conventional discrete gas absorption cell, which brings high compactness. By optimizing the degree of thermally tuned interference and pumping parameters of the microcavity structure, a coupling-free light source in the form of a multi-soliton comb with a pump-comb conversion efficiency of over 50% can be achieved. The sensor performance is accurately evaluated through theoretical simulations of noise-containing absorption spectra of multiple gases, confirming its applicability.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Gangyun Guan, Anqi Liu, Mingquan Pi, Chuantao Zheng, Kaiyuan Zheng, Bingjie Zhu, Xuyang Wu, Yue Yang, Jie Zheng, Yiding Wang, and Frank K. Tittel "Theoretical study of multi-gas sensing chip using backward interference Si₃N₄ microcavity Kerr comb", Proc. SPIE 12935, Fourteenth International Conference on Information Optics and Photonics (CIOP 2023), 129354N (24 November 2023); https://doi.org/10.1117/12.3008061

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KEYWORDS

Optical microcavities

Waveguides

Solitons

Dispersion

Absorption

Frequency combs

Simulations

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