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10 May 2024 Piezoelectric Impedance-based robust mass sensing with temperature decoupling
Jiawen Xu, Ruqiang Yan, Jiaji Chen
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Proceedings Volume 12951, Health Monitoring of Structural and Biological Systems XVIII; 129511J (2024) https://doi.org/10.1117/12.3010066
Event: SPIE Smart Structures + Nondestructive Evaluation, 2024, Long Beach, California, United States
Abstract
Microcantilevers are widely adopted in various fields for micro-mass sensing due to their simple structure and high sensitivity. The conventional microcantilever-based measurement methods required ultra-precision temperature control. However, such a requirement could hardly be satisfied and the temperature shifting would deteriorate the accuracy of mass sensing. In this research, an impedance-based temperature decoupling method is developed for robust mass sensing over a wide temperature range. The relative relationships of the peaks in the impedance signals are adopted for decoupling the temperature dependent terms in the eigenvalue problem. Besides, a CBAM-CNN network is developed for the modeling and mass sensing. Experimental studies indicate the proposed method yield robust mass sensing with accuracy up to 99.10 % under temperature range from 25 ℃ to 55 ℃. This method enables cantilever-based mass sensing without temperature compensation.
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Jiawen Xu, Ruqiang Yan, and Jiaji Chen "Piezoelectric Impedance-based robust mass sensing with temperature decoupling", Proc. SPIE 12951, Health Monitoring of Structural and Biological Systems XVIII, 129511J (10 May 2024); https://doi.org/10.1117/12.3010066
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KEYWORDS
Temperature metrology
Modeling
Temperature control
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