Research on high precision control algorithm

Hanlin Li; We Ge

doi:10.1117/12.3007793

18 December 2023 Research on high precision control algorithm

Hanlin Li, We Ge

Proceedings Volume 12959, AOPC 2023: Laser Technology and Applications; and Optoelectronic Devices and Integration; 129591J (2023) https://doi.org/10.1117/12.3007793
Event: Applied Optics and Photonics China 2023 (AOPC2023), 2023, Beijing, China

Abstract

With the rapid development of industry, semiconductor, aerospace and other industries, the device processing size is getting smaller and smaller, and the positioning accuracy of high-end equipment is becoming higher and higher in recent years, the development level of precision positioning technology, to a certain extent, characterizes a country's scientific and technological strength, and reflects the country's comprehensive national strength. From aviation and aerospace to the lithography industry directly related to various chips, precision engineering technology plays an important role in them. Control accuracy is often a very important indicator to measure whether the control environment meets the requirements. In this paper, permanent magnet synchronous linear motor is used to compare the influence of various algorithms on the control accuracy of the motor. This paper mainly conducts in-depth research on the control algorithms and compares various performance indicators of different algorithms in the same working environment. First of all, the control principle and core points of PID control algorithm, SMG sliding mode control algorithm and ADRC active disturbance rejection control algorithm are briefly described. The control system block diagram of these three control algorithms is given, and the advantages and disadvantages of these three control algorithms are expounded. The permanent magnet synchronous linear motor control system modeling is carried out on matlab/simulink. Then use matlab/simulink to carry out these three control algorithms for the motor control simulation and control experiment, modify the parameters and then compare the simulation results, and point out which algorithm is better in the control environment.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Hanlin Li and We Ge "Research on high precision control algorithm", Proc. SPIE 12959, AOPC 2023: Laser Technology and Applications; and Optoelectronic Devices and Integration, 129591J (18 December 2023); https://doi.org/10.1117/12.3007793

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KEYWORDS

Control systems

Fuzzy logic

Complex systems

Design rules

Systems modeling

Computer simulations

Nonlinear control

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