Phase-shifting algorithm using a single interferogram and deep learning

J. Jeon; Y. Kim

doi:10.1117/12.3016935

18 June 2024 Phase-shifting algorithm using a single interferogram and deep learning

J. Jeon, Y. Kim

Proceedings Volume 12997, Optics and Photonics for Advanced Dimensional Metrology III; 1299716 (2024) https://doi.org/10.1117/12.3016935
Event: SPIE Photonics Europe, 2024, Strasbourg, France

Conference Poster

Abstract

In optical interferometry, phase-shifting algorithms can calculate the phase maps of the geometrical properties from measured samples with high accuracy. The phase-shifting algorithms require several interferograms captured from dynamic adjustable interferometers, with shifting occurring at uniform intervals. It is crucial to maintain the uniform shift intervals in phase-shifting algorithms because nonuniformities in intervals cause nonlinearities in the system and degrade the accuracy of measurement. However, experimental conditions inevitably introduce errors into dynamic adjustments due to environmental uncertainties. To address these drawbacks, we propose a novel method, shifted-interferogram generator, that eliminates the need for dynamic adjustments by utilizing a static optical interferometer with a single frame of interferogram. The proposed interferogram shifter involves capturing a single frame of an interferogram and employing deep learning to generate interferograms with ideal shifting intervals. For assessment of the proposed method, a single interferogram indicating surface shape of an optical flat was captured by Fizeau interferometer and given to the shifted-interferogram generator. The generated shifted interferograms were compared with the ideally shifted interferograms which contain exact shifting intervals and the results shows high similarities. Subsequently, the generated interferograms were used to extract phase, resulting in significantly improved accuracy comparable to more complex multi-step phase-shifting algorithms. This approach not only enhances measurement accuracy but also simplifies experimental setups, reducing susceptibility to environmental uncertainties.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

J. Jeon and Y. Kim "Phase-shifting algorithm using a single interferogram and deep learning", Proc. SPIE 12997, Optics and Photonics for Advanced Dimensional Metrology III, 1299716 (18 June 2024); https://doi.org/10.1117/12.3016935

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