Poster + Paper
18 June 2024 Technological challenges in the measurement of photonic products with white light interferometry
Author Affiliations +
Conference Poster
Abstract
There are manifold challenges in the measurement of photonic products with white light interferometry (WLI), especially where near- or inline measurement is needed. To face these challenges, new approaches in software and hardware are required. In this presentation, the use of a new white light interferometry sensor with advanced features and relevant unique capabilities is highlighted, with applications in the fields of optical and Photonics Integrated Circuit (PIC) development and production.
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
Israfil Ansari, Natã Franco Soares de Bem, and S. M. P. Kalaiselvi "Technological challenges in the measurement of photonic products with white light interferometry", Proc. SPIE 12997, Optics and Photonics for Advanced Dimensional Metrology III, 129971K (18 June 2024); https://doi.org/10.1117/12.3022537
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KEYWORDS
Optical interferometry

Atomic force microscopy

Polishing

Semiconducting wafers

Defect detection

Sensors

Surface finishing

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