Ultrafast laser drilling of through vias in soda-lime glass using GHz-burst mode operation

Pierre Balage; John Lopez; Manon Lafargue; Théo Guilberteau; Guillaume Bonamis; Clemens Hönninger; Inka B. Manek-Hönninger

doi:10.1117/12.3017014

20 June 2024 Ultrafast laser drilling of through vias in soda-lime glass using GHz-burst mode operation

Pierre Balage, John Lopez, Manon Lafargue, Théo Guilberteau, Guillaume Bonamis, Clemens Hönninger, Inka B. Manek-Hönninger

Author Affiliations +

Proceedings Volume 13005, Laser + Photonics for Advanced Manufacturing; 1300504 (2024) https://doi.org/10.1117/12.3017014
Event: SPIE Photonics Europe, 2024, Strasbourg, France

Abstract

In this contribution we show through via drillings in dielectrics by ultrafast laser top-down percussion drilling in GHzburst mode. We point out some limitations that occur during the drilling process and show how to overcome these. Finally, we obtained through vias of almost constant diameter in Sodalime glass, which might be of interest in the microelectronics industry for the fabrication of glass interposers.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Pierre Balage, John Lopez, Manon Lafargue, Théo Guilberteau, Guillaume Bonamis, Clemens Hönninger, and Inka B. Manek-Hönninger "Ultrafast laser drilling of through vias in soda-lime glass using GHz-burst mode operation", Proc. SPIE 13005, Laser + Photonics for Advanced Manufacturing, 1300504 (20 June 2024); https://doi.org/10.1117/12.3017014

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