Presentation + Paper
1 October 2024 Performance test results of Twin-TQCM under cryogenic temperature
Author Affiliations +
Abstract
Japan Aerospace Exploration Agency, JAXA, and Nihon Dempa Kogyo Co., Ltd., NDK, developed an original QCM sensor system under wide temperature range named “Twin-QCM” for ground use since 2015, put on the market in 2017. Twin-QCM series has “Twin-CQCM” with built-in heater and “Twin-TQCM” with built-in peltier element. Twin-TQCM has an operational temperature limitation at low temperature caused by use of built-in peltier element. Since 2021, we have proceeded to initiate the development of advanced Twin-QCM aiming for flight and exploration. Then, we decided to develop a new version of Twin-TQCM which can be used under cryogenic temperature, i.e., lower than -80 degrees C, named “cryo-use Twin-TQCM (Engineering Model).” Then, we have planned to evaluate the performance of the Engineering Model in terms of deposition sensing. In this presentation, we will report the test results of the experiment for performance evaluation of cryo-use Twin-TQCM Engineering Model.
Conference Presentation
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
Eiji Miyazaki, Hiroki Kimura, Hiroyuki Kukita, Tsuyoshi Shiobara, Yuta Tsuchiya, Chisako Kanzaki, Riyo Yamanaka, and Koichi Fujihira "Performance test results of Twin-TQCM under cryogenic temperature", Proc. SPIE 13129, Optical Modeling and Performance Predictions XIV, 131290H (1 October 2024); https://doi.org/10.1117/12.3028343
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KEYWORDS
Sensors

Cryogenics

Temperature control

Quartz

Temperature metrology

Vacuum

Vacuum chambers

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