Characterization of supersmooth surfaces with roughness below 0.1 nm

Andrew J. Schmitt

doi:10.1117/12.34858

1 July 1990 Characterization of supersmooth surfaces with roughness below 0.1 nm

Andrew J. Schmitt

Proceedings Volume 1319, Optics in Complex Systems; (1990) https://doi.org/10.1117/12.34858
Event: 15th International Optics in Complex Systems, 1990, Garmisch, Germany

Abstract

Supersmooth surfaces with a roughness of 0. 05 nm have been developed and characterized by Nomarski microscopy and other optical and mechanical profiling systems. Photomicro graphs of these surfaces are being discussed. 1.

Citation Download Citation

Andrew J. Schmitt "Characterization of supersmooth surfaces with roughness below 0.1 nm", Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); https://doi.org/10.1117/12.34858

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