3D topography and roughness measurement of the inner surface of semi-closed parts

Xiangyu Zhao; Jinlong Zhu

doi:10.1117/12.3032321

14 August 2024 3D topography and roughness measurement of the inner surface of semi-closed parts

Xiangyu Zhao, Jinlong Zhu

Author Affiliations +

Proceedings Volume 13248, Fourth Optics Frontier Conference (OFS 2024); 1324803 (2024) https://doi.org/10.1117/12.3032321
Event: Fourth Optics Frontier Conference (OFS 2024), 2024, Hangzhou, China

Abstract

Semi-enclosed parts have a wide range of applications in precision manufacturing, aerospace, and reverse design. Understanding and characterizing the 3D topography and roughness of the internal surfaces of semi-enclosed parts is critical to ensure part performance, assembly quality, sealing effectiveness, friction characteristics, vibration behavior, and wear durability. However, some semi-enclosed parts are small and have complex internal structures, and conventional measurement methods are not effective in accurately measuring the 3D topography and roughness of the internal surfaces of semi-enclosed parts. Therefore, we propose a microdevice-based interferometry system, which adds micrometer-scale devices such as microsteering devices to the interferometric structure, for measuring 3D topography and roughness of the inner surface of semi-closed parts. Experiments have demonstrated that our proposed measurement system has excellent measurement accuracy down to the nanometer level. By providing accurate surface 3D topography and roughness data, this technique opens up new possibilities for future engineering design and manufacturing and is expected to advance the development of advanced manufacturing technologies.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Xiangyu Zhao and Jinlong Zhu "3D topography and roughness measurement of the inner surface of semi-closed parts", Proc. SPIE 13248, Fourth Optics Frontier Conference (OFS 2024), 1324803 (14 August 2024); https://doi.org/10.1117/12.3032321

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE