Optical and mechanical characterization of spin-on deposited silicon and titanium dioxide films

Pengnian Shen; Ming-Jun Li; S. Iraj Najafi; John F. Currie; Richard Leonelli

doi:10.1117/12.22572

1 November 1990 Optical and mechanical characterization of spin-on deposited silicon and titanium dioxide films

Pengnian Shen, Ming-Jun Li, S. Iraj Najafi, John F. Currie, Richard Leonelli

Proceedings Volume 1328, Sol-Gel Optics; (1990) https://doi.org/10.1117/12.22572
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

Spin-on deposited SiO-TiO2 thin films (pure and doped with dyes) are produced. Their optical and mechanical properties are determined and their use for a number of applications is investigated. The spin-on deposited SiOi film has been succesfully doped with coumarin as a colour center and characterized as a waveguide overlay.

Citation Download Citation

Pengnian Shen, Ming-Jun Li, S. Iraj Najafi, John F. Currie, and Richard Leonelli "Optical and mechanical characterization of spin-on deposited silicon and titanium dioxide films", Proc. SPIE 1328, Sol-Gel Optics, (1 November 1990); https://doi.org/10.1117/12.22572

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