The sol-gel processing of lithium niobate thin-layers on silicon from heterometallic alkoxide
solutions is described. Advantages of sol-gel processing for low-temperature formation of stoichiometric
lithium niobate are discussed. A recyrstallization procedure, involving a bimetallic alkoxide, was
developed for the purification of alkoxide solutions. The alkoxide complex contained the appropriate cation
ratio for the preparation of stoichiometric lithium niobate. Solvent selection, addition of nitric acid or
ammonium hydroxide, and thermal processing conditions were shown to affect the ceramic
microstructures. In particular, the solvent system and additives influenced grain growth and porosity in the
crystallized layers. Methoxyethanol-derived layers had a grain size approximately twice that observed for
the ethanol system. Use of a rapid heating process produced dense layers at 650°C, whereas oxygen
treatments allowed for crystallization at 400°C.
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