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4 November 2024 Modeling and optimization of MEMS microphone dust protection mesh for improved for acoustic performance using finite element method simulation
Shiwang Zhang, Jiazhu Li, Jiawei Yuan, Zixuan Li, Zheng Yuan, Shaohui Qin, Zilong Zhao, Hongqiang Tan, Ruiyan Luo, Yihe Zhao, Jie Li, Wendi Gao, Zhikang Li, Libo Zhao
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Proceedings Volume 13420, Third International Conference on New Materials, Machinery, and Vehicle Engineering (NMMVE 2024); 134201F (2024) https://doi.org/10.1117/12.3055243
Event: International Conference on New Materials, Machinery, and Vehicle Engineering 2024, 2024, Dalian, China
Abstract
Currently, research on Micro-Electro-Mechanical Systems (MEMS) microphone dust protection meshes has predominantly focused on dust prevention capabilities, with scant attention given to acoustic performance, and there is a lack of systematic studies on the patterns of acoustic performance variation. This study utilizes finite element analysis to investigate the impact of structural parameters such as perforation radius, perforation rate, number of perforations, and perforation distribution patterns, as well as material properties like the density of the expanded-polytetrafluoroethylene(e-PTFE) membrane, on acoustic impedance and sound transmission loss. It was found that, at a constant perforation rate, a larger perforation radius results in lower acoustic impedance and sound transmission loss. This research provides a theoretical basis for the subsequent design of MEMS microphone dust protection meshes. Furthermore, an intelligent dust protection device based on metasurfaces has been proposed, which achieves an organic integration of dust prevention and sound wave control functions, and exhibits high sensitivity and robustness, laying the foundation for the development of future smart auditory technologies.
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Shiwang Zhang, Jiazhu Li, Jiawei Yuan, Zixuan Li, Zheng Yuan, Shaohui Qin, Zilong Zhao, Hongqiang Tan, Ruiyan Luo, Yihe Zhao, Jie Li, Wendi Gao, Zhikang Li, and Libo Zhao "Modeling and optimization of MEMS microphone dust protection mesh for improved for acoustic performance using finite element method simulation", Proc. SPIE 13420, Third International Conference on New Materials, Machinery, and Vehicle Engineering (NMMVE 2024), 134201F (4 November 2024); https://doi.org/10.1117/12.3055243
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KEYWORDS
Acoustics
Acoustic waves
Microelectromechanical systems
Design
3D modeling
Finite element methods
Displays
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