Broadband multilayer coated blazed grating for x-ray wavelengths below 0.6 nm

Antonius J. F. den Boggende; Marcel P. Bruijn; Jan Verhoeven; H. Zeijlemaker; Eric J. Puik; Howard A. Padmore

doi:10.1117/12.23314

1 January 1991 Broadband multilayer coated blazed grating for x-ray wavelengths below 0.6 nm

Antonius J. F. den Boggende, Marcel P. Bruijn, Jan Verhoeven, H. Zeijlemaker, Eric J. Puik, Howard A. Padmore

Proceedings Volume 1345, Advanced X-Ray/EUV Radiation Sources and Applications; (1991) https://doi.org/10.1117/12.23314
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

A broadband Rh/C (50/50) multilayer coating was deposited on a blazed reflection grating replica sample. A calculation of possible materials and configurations showed that a 6-layer pair multilayer of rhodium/carbon or a 7 layer of nickel/carbon covered by 2 nm rhodium layer would give a factor of 6-10 increase in reflection efficiency depending on the roughness of the layer interfaces. Measurements with X-rays at wavelengths down to 0.4 nm on a Rh/C multilayer blazed grating combination showed a substantial increase in reflectivity with respect to a gold coated grating for a fixed angle of incidence of 1 deg.

Citation Download Citation

Antonius J. F. den Boggende, Marcel P. Bruijn, Jan Verhoeven, H. Zeijlemaker, Eric J. Puik, and Howard A. Padmore "Broadband multilayer coated blazed grating for x-ray wavelengths below 0.6 nm", Proc. SPIE 1345, Advanced X-Ray/EUV Radiation Sources and Applications, (1 January 1991); https://doi.org/10.1117/12.23314

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