Integrated optical channel waveguides in silicon using SiGe alloys

Armin O. Splett; Joachim Schmidtchen; Berndt Schueppert; Klaus Petermann

doi:10.1117/12.24472

1 February 1991 Integrated optical channel waveguides in silicon using SiGe alloys

Armin O. Splett, Joachim Schmidtchen, Berndt Schueppert, Klaus Petermann

Proceedings Volume 1362, Physical Concepts of Materials for Novel Optoelectronic Device Applications II: Device Physics and Applications; (1991) https://doi.org/10.1117/12.24472
Event: Physical Concepts of Materials for Novel Optoelectronic Device Applications, 1990, Aachen, Germany

Abstract

Different techniques for fabrication of single-mode waveguides in silicon by etching and indiffusion are reported. Minimum propagation losses around 3dB/cm at a wavelength of 1. 3Lm have been achieved.

Citation Download Citation

Armin O. Splett, Joachim Schmidtchen, Berndt Schueppert, and Klaus Petermann "Integrated optical channel waveguides in silicon using SiGe alloys", Proc. SPIE 1362, Physical Concepts of Materials for Novel Optoelectronic Device Applications II: Device Physics and Applications, (1 February 1991); https://doi.org/10.1117/12.24472

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