Figure of merit for calibration and comparison of linewidth measurement instruments

Robert R. Hershey; Terrence E. Zavecz

doi:10.1117/12.44421

1 July 1991 Figure of merit for calibration and comparison of linewidth measurement instruments

Proceedings Volume 1464, Integrated Circuit Metrology, Inspection, and Process Control V; (1991) https://doi.org/10.1117/12.44421
Event: Microlithography, 1991, San Jose, CA, United States

Abstract

A new figure of merit, the critical dimension capability factor, of CDC, is described. The CDC incorporates measurements taken over a range of linewidths and over a range of process variations which simulate normal and extreme process operating conditions. Under these conditions CDC uniquely quantifies the capability of the measurement instrument on a given substrate and for a given set of parameter settings. CDC is calculated by performing a linear regression between measurements generated by the instrument under test (IUT) and a set of reference values (internally generated standard values). The mean square error (MSE) between the regression line and the observed values is then partitioned into components which estimate the contribution to the MSE from various sources based on a rigorous statistical analysis. The final CDC value is defined as the linewidth to uncertainty ratio and is a function of uncertainty introduced in the characterization procedure as well as the uncertainty introduced when the IUT makes a measurement in practice. Since the CDC is a function of the overall uncertainty in the measurements of the IUT relative to the reference values, it can legitimately be compared from one instrument to another and used to evaluate alternative measurement methods and technologies.

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Robert R. Hershey and Terrence E. Zavecz "Figure of merit for calibration and comparison of linewidth measurement instruments", Proc. SPIE 1464, Integrated Circuit Metrology, Inspection, and Process Control V, (1 July 1991); https://doi.org/10.1117/12.44421

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