Diamond-like carbon thin films prepared by rf-plasma CVD

Jie Jiang; Chen Zan Liu

doi:10.1117/12.47311

1 November 1991 Diamond-like carbon thin films prepared by rf-plasma CVD

Jie Jiang, Chen Zan Liu

Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47311
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China

Abstract

The depositing process, growing rate, structure, and optical properties of Diamondlike Carbon (DLC) films have been studied. It's shown that in the DLC films approximating amorphous carbon and diamond coexist from TED and Raman spectra, and the IR absorption is very low in 2.5 - 14.0 micrometers wavelength range from IR spectrophotometer. The other properties of this films such as chemical, thermal stability, mechanical, and adhesion are discussed. Finally, efficient, durable antireflection and protective coatings on IR optics are described.

Citation Download Citation

Jie Jiang and Chen Zan Liu "Diamond-like carbon thin films prepared by rf-plasma CVD", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47311

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available