Paper
1 November 1991 Superconductivity and structural changes of Ar ion-implanted YBa2Cu3O7-x thin films
Yi Jie Li, Cong Xin Ren, Guo Liang Chen, Jian Min Chen, Shichang Zou
Author Affiliations +
Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47291
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China
Abstract
The effects of Ar ion implantation on superconductivity and structural changes in epitaxial YBa2Cu3O7-x thin films have been studied using x-ray diffraction, scattering electron microscopy (SEM), and transmission electron microscopy (TEM). It was found that both the critical current density Jc and the superconducting transition temperature Tc significantly decreased with the fluence. The sample went through the metal to semiconductor to insulator transitions with the increase of fluence. The TEM images showed that the sample implanted with high fluence became amorphous.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yi Jie Li, Cong Xin Ren, Guo Liang Chen, Jian Min Chen, and Shichang Zou "Superconductivity and structural changes of Ar ion-implanted YBa2Cu3O7-x thin films", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47291
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KEYWORDS
Argon

Ion implantation

Ions

Thin films

Superconductors

Technetium

Superconductivity

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