Novel monolithic chip-integrated color spectrometer: the distributed-wavelength filter component

James W. Holm-Kennedy; Koon Wing Tsang; Wah Wai Sze; Fenglai Jiang; Datong Yang

doi:10.1117/12.48685

1 December 1991 Novel monolithic chip-integrated color spectrometer: the distributed-wavelength filter component

James W. Holm-Kennedy, Koon Wing Tsang, Wah Wai Sze, Fenglai Jiang, Datong Yang

Proceedings Volume 1527, Current Developments in Optical Design and Optical Engineering; (1991) https://doi.org/10.1117/12.48685
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

A novel optical distributed-wavelength filter for IC integration and chip-integrated spectroscopy is described. The filter structure is of Fabry-Perot character. It is comprised of a wedge-shaped dielectric film sandwiched between two reflecting thin films. The novel fabrication technology employed is IC batch compatible. The marriage of this novel filter with a distributed detector array is intended to provide a monolithic chip-integrated spectrometer. Such a spectrometer is expected to be of high performance, rugged, small, light weight and of low cost. Imaging structures using arrays of microfilters fabricated using the same technology are also targeted. The filter arrays are to provide wavelength-selective imaging. Experimental prototype visible-filter results have already exhibited approximately 40% transmission. Analytical results for additional prototypes are described. Certain prototypes indicate 80% transmission is achievable. Bandwidth and transmission features are determined by the design features and are very flexible. For the first time, manufacture of low-cost, light-weight, rugged monolithic chip spectrometers appears feasible.

Citation Download Citation

James W. Holm-Kennedy, Koon Wing Tsang, Wah Wai Sze, Fenglai Jiang, and Datong Yang "Novel monolithic chip-integrated color spectrometer: the distributed-wavelength filter component", Proc. SPIE 1527, Current Developments in Optical Design and Optical Engineering, (1 December 1991); https://doi.org/10.1117/12.48685

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