Overview: sensitive techniques for surface measurement and characterization

Jean M. Bennett

doi:10.1117/12.57756

1 April 1992 Overview: sensitive techniques for surface measurement and characterization

Jean M. Bennett

Proceedings Volume 1573, Commercial Applications of Precision Manufacturing at the Sub-Micron Level; (1992) https://doi.org/10.1117/12.57756
Event: SIRA, 1991, London, United Kingdom

Abstract

A brief overview is given of the papers presented in the session on Measurement and Characterization. Then techniques are mentioned that are appropriate for quantifying precision manufactured surfaces at the sub-micron level. The new techniques of atomic probe microscopy and long scan profilometers are highlighted.

Citation Download Citation

Jean M. Bennett "Overview: sensitive techniques for surface measurement and characterization", Proc. SPIE 1573, Commercial Applications of Precision Manufacturing at the Sub-Micron Level, (1 April 1992); https://doi.org/10.1117/12.57756

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