Design of metrology laboratory and microfab center against vibration from shakers laboratory of the new Hong Kong University of Science and Technology

Westwood K. W. Hong; Nicholas Boulter

doi:10.1117/12.56836

1 February 1992 Design of metrology laboratory and microfab center against vibration from shakers laboratory of the new Hong Kong University of Science and Technology

Westwood K. W. Hong, Nicholas Boulter

Author Affiliations +

Proceedings Volume 1619, Vibration Control in Microelectronics, Optics, and Metrology; (1992) https://doi.org/10.1117/12.56836
Event: SPIE Technical: OPTCON '91, 1991, San Jose, CA, United States

Abstract

The design of vibration-sensitive laboratories normally requires the protection of these areas from incoming vibration generated by plant, road traffic and footfall impacts. The compact nature of the new HKUST campus requires a more exact design than one would find for a spacious campus with laboratory buildings nicely separated. The HKUST user required a centralized laboratory service with easy access to the major testing facilities. This resulted in the location of vibration sensitive areas (micro-fabrication center and metrology laboratory) close to a Structural Laboratory housing large shakers. These were to be used for seismic and modal testing of structural elements and prototypes. The design of the support structure for the shakers, known as the reaction floor, was critical to the success of the building. Particular attention was paid to the design and construction of the foundations for the reaction floor. For controlling the vibration generated by 10-ton-force rated shakers, a massive structure with caisson supports was designed for the reaction floor and reaction wall. Finite element models were employed to calculate the response of the laboratory floors located above the reaction floor in other parts of the building. The metrology laboratory structure and the foundation design of the reaction floor and a wafer fab built in the U.K. will be presented.

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Westwood K. W. Hong and Nicholas Boulter "Design of metrology laboratory and microfab center against vibration from shakers laboratory of the new Hong Kong University of Science and Technology", Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); https://doi.org/10.1117/12.56836

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KEYWORDS

Metrology

Buildings

Roads

Microelectronics

Vibration control

Spine

Semiconducting wafers

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