Influence of bases and benches on the performance of vibration-sensitive equipment

Colin G. Gordon; Yung Q. Tran

doi:10.1117/12.56828

1 February 1992 Influence of bases and benches on the performance of vibration-sensitive equipment

Colin G. Gordon, Yung Q. Tran

Proceedings Volume 1619, Vibration Control in Microelectronics, Optics, and Metrology; (1992) https://doi.org/10.1117/12.56828
Event: SPIE Technical: OPTCON '91, 1991, San Jose, CA, United States

Abstract

In most state-of-the-art microelectronics facilities, process equipment (tools), including vibration-sensitive equipment, is set on a structure to bring the equipment to the level of the raised access floor. Depending upon their design these bases can amplify, through resonance, the vibration amplitudes that travel from the structural floor to the equipment base. Similarly, benches that are commonly used to support microscopes and other equipment will often amplify the floor vibrations. Data are presented from recent measurements that illustrate the nature and magnitude of these effects. The concept of ''rigid body rotation'' as a source of horizontal vibration on bases and tables is discussed briefly.

Citation Download Citation

Colin G. Gordon and Yung Q. Tran "Influence of bases and benches on the performance of vibration-sensitive equipment", Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); https://doi.org/10.1117/12.56828

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available