Film thickness measurement of ultrathin film using UV wavelength light

Nobuyuki Kondo; Nariaki Fujiwara; Atsushi Abe

doi:10.1117/12.59825

1 June 1992 Film thickness measurement of ultrathin film using UV wavelength light

Nobuyuki Kondo, Nariaki Fujiwara, Atsushi Abe

Proceedings Volume 1673, Integrated Circuit Metrology, Inspection, and Process Control VI; (1992) https://doi.org/10.1117/12.59825
Event: Microlithography '92, 1992, San Jose, CA, United States

Abstract

In semiconductor production lines, film-thickness is typically measured utilizing ellipsometry or the microspectroscopic measurement. The microspectroscopic measurement is fast, highly accurate and easy to carry out. However, when the film thickness is less than tens of nanometer this method cannot provide adequate measurements. We changed the wavelength used for measurement from the visible light range to the ultraviolet (UV) range and were able to achieve ultrathin-film measurement. At the same time, we found other useful applications of this research: SiO2-film measurement on the polysilicon layer, evaluation of the degree of crystallization of Si film, and others. For highly accurate measurements of ultrathin film, it is vital that the focus and angle be precisely adjusted. In this paper, we report a UV film- thickness measurement system with an automatic adjustment mechanism for the focus and sample surface angle, and also present examples of estimates using this system.

Citation Download Citation

Nobuyuki Kondo, Nariaki Fujiwara, and Atsushi Abe "Film thickness measurement of ultrathin film using UV wavelength light", Proc. SPIE 1673, Integrated Circuit Metrology, Inspection, and Process Control VI, (1 June 1992); https://doi.org/10.1117/12.59825

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available