New design of silicon organic materials and processes for microelectronics (Invited Paper)

P. A. Averichkin; A. I. Maslakov; Kamil A. Valiev; Leonid V. Velikov

doi:10.1117/12.130374

1 June 1992 New design of silicon organic materials and processes for microelectronics (Invited Paper)

P. A. Averichkin, A. I. Maslakov, Kamil A. Valiev, Leonid V. Velikov

Author Affiliations +

Proceedings Volume 1674, Optical/Laser Microlithography V; (1992) https://doi.org/10.1117/12.130374
Event: Microlithography '92, 1992, San Jose, CA, United States

Abstract

In present time six types of siliconorganic materials are commonly used in microelectronic, technology: polysiloxanes, polysilozanes, polysilmethylenes, polysilphenylenes, organic polymers with silicon getheroathorns and polysilanes [1].

Citation Download Citation

P. A. Averichkin, A. I. Maslakov, Kamil A. Valiev, and Leonid V. Velikov "New design of silicon organic materials and processes for microelectronics (Invited Paper)", Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); https://doi.org/10.1117/12.130374

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