Paper
12 August 1992 Analysis of criteria selection for IRFPA detector production
Jean-Pierre Chatard, Daniel Zenatti
Author Affiliations +
Abstract
The SOFRADIR technology is in fact the result of years of studies in the field of CMT photovoltaic detectors and CCD readout circuits on silicon. The resulting components are so good that it has been possible to put them in production. Very good yield have been obtained and now it is necessary to go deeper into the production analysis as the question is no longer basic productibility. Therefore the target of this paper is toshow the very detailed approach we have taken in order to obtain the best cost in production.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jean-Pierre Chatard and Daniel Zenatti "Analysis of criteria selection for IRFPA detector production", Proc. SPIE 1683, Infrared Focal Plane Array Producibility and Related Materials, (12 August 1992); https://doi.org/10.1117/12.137781
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Cited by 1 scholarly publication.
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KEYWORDS
Staring arrays

Sensors

Semiconducting wafers

Charge-coupled devices

Diodes

Liquid phase epitaxy

Manufacturing

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