Focused laser beam scattering on moving nonsmooth surfaces with one-dimensional profile

Vladimir P. Ryabukho; Valery V. Tuchin; Sergey S. Ulyanov

doi:10.1117/12.58646

1 April 1992 Focused laser beam scattering on moving nonsmooth surfaces with one-dimensional profile

Vladimir P. Ryabukho, Valery V. Tuchin, Sergey S. Ulyanov

Proceedings Volume 1723, LAMILADIS '91 Intl Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces; (1992) https://doi.org/10.1117/12.58646
Event: LAMILADIS '91: International Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces, 1991, Chernivsti, Ukraine

Abstract

The present paper contains the main results of the problem solution for focused laser beams diffraction on moving rough surfaces. The scattering space is considered to be nonlinear and inertial system, the input signal is the function, describing surface profile, and response is the fluctuations of scattered wave intensity. On the basis of results obtained the mechanisms of output signal formation in dynamic system are investigated and output characteristics analysis is made. The metrological possibilities of triangulation method adapted to surface microprofile measuring are discussed.

Citation Download Citation

Vladimir P. Ryabukho, Valery V. Tuchin, and Sergey S. Ulyanov "Focused laser beam scattering on moving nonsmooth surfaces with one-dimensional profile", Proc. SPIE 1723, LAMILADIS '91 Intl Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces, (1 April 1992); https://doi.org/10.1117/12.58646

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