Soft x-ray microscope with zone plates at UVSOR

Norio Watanabe; Yoshio Shimanuki; Mieko Taniguchi; Hiroshi Kihara

doi:10.1117/12.138722

13 January 1993 Soft x-ray microscope with zone plates at UVSOR

Norio Watanabe, Yoshio Shimanuki, Mieko Taniguchi, Hiroshi Kihara

Proceedings Volume 1741, Soft X-Ray Microscopy; (1993) https://doi.org/10.1117/12.138722
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

A soft x-ray microscope with zone plates was set up at UVSOR (Okazaki, Japan). A 0.41 micrometers line and space pattern was clearly distinguished using an objective zone plate with the outermost zone width of 0.41 micrometers . Modulation transfer functions were measured at wavelengths of 3.1 nm and 5.4 nm, and compared with theoretical calculations. Considering the resolution of a microchannel plate used as a detector, the agreement is fairly good. With this microscope, some biological specimens such as diatoms, spicule of trepang, crab and rabbit muscles, human blood cells, human chromosomes, and magnetotactic bacterium were observed at 3.1 nm and 5.4 nm. With an environmental chamber (wet cell) using polypropylene foils as windows, wet specimens were observed at a wavelength of 4.6 nm. Images of spicule of trepang, human blood cell, and cultured protoplast of plant cell stained by methyl mercury were observed with good contrast.

Citation Download Citation

Norio Watanabe, Yoshio Shimanuki, Mieko Taniguchi, and Hiroshi Kihara "Soft x-ray microscope with zone plates at UVSOR", Proc. SPIE 1741, Soft X-Ray Microscopy, (13 January 1993); https://doi.org/10.1117/12.138722

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