Laser-induced PVD technique for deposition of diamondlike carbon films

Klaus R. Mann; F. Mueller

doi:10.1117/12.143038

19 April 1993 Laser-induced PVD technique for deposition of diamondlike carbon films

Klaus R. Mann, F. Mueller

Proceedings Volume 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design; (1993) https://doi.org/10.1117/12.143038
Event: Applications in Optical Science and Engineering, 1992, Boston, MA, United States

Abstract

Diamond-like-carbon (DLC) films have been grown on various substrates at low temperatures and low pressure by ablation of carbon particles using KrF excimer laser pulses of 30 ns duration. It is shown that the film properties strongly depend on the energy density of the incident laser beam and the deposition temperature. At energy densities above 8 J/cm² and low substrate temperatures (< 200 degree(s)C) the coatings are transparent, while at lower energy densities or higher substrate temperatures only opaque films are obtained. The thin films were characterized by optical spectroscopy, x-ray diffraction, Raman scattering, and secondary electron microscopy. In addition to film growth and characterization, the kinetic energies and masses of laser ablated carbon ions have been investigated by time-of-flight spectroscopy. We observe an almost linear relation between kinetic particle energy and laser energy density, with maximum values as high as 220 eV at 23 J/cm², indicating a strong correlation between laser energy density, particle energies and DLC film properties.

Citation Download Citation

Klaus R. Mann and F. Mueller "Laser-induced PVD technique for deposition of diamondlike carbon films", Proc. SPIE 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design, (19 April 1993); https://doi.org/10.1117/12.143038

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