Scanning probe microscopy: trends and image processing issues

Gopal Sarma Pingali; Ramesh C. Jain

doi:10.1117/12.144810

6 May 1993 Scanning probe microscopy: trends and image processing issues

Gopal Sarma Pingali, Ramesh C. Jain

Proceedings Volume 1907, Machine Vision Applications in Industrial Inspection; (1993) https://doi.org/10.1117/12.144810
Event: IS&T/SPIE's Symposium on Electronic Imaging: Science and Technology, 1993, San Jose, CA, United States

Abstract

In this paper we present an overview of the state of the art in SXM with emphasis on image processing techniques for SXM. We outline the principle of operation of different scanning probe microscopes. Issues related to sensor technology are discussed. Commercially available scanning probe microscopes are listed and their features summarized. We review in detail the image processing work that has been done to date in relation to SXM and raise relevant issues. Existing and potential applications of SXM are discussed. Finally, we point out directions for future research in image processing related to SXM.

Citation Download Citation

Gopal Sarma Pingali and Ramesh C. Jain "Scanning probe microscopy: trends and image processing issues", Proc. SPIE 1907, Machine Vision Applications in Industrial Inspection, (6 May 1993); https://doi.org/10.1117/12.144810

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