Conformal acoustic waveguide sensor development

Jeffrey N. Schoess; J. David Zook

doi:10.1117/12.148010

12 July 1993 Conformal acoustic waveguide sensor development

Jeffrey N. Schoess, J. David Zook

Proceedings Volume 1918, Smart Structures and Materials 1993: Smart Sensing, Processing, and Instrumentation; (1993) https://doi.org/10.1117/12.148010
Event: 1993 North American Conference on Smart Structures and Materials, 1993, Albuquerque, NM, United States

Abstract

This paper describes the detailed design of an acoustic emission-based micromachined sensor for smart structures applications to assess in-flight structural integrity. This unique sensor approach combines silicon sensor micromachining, conformal optical waveguide technology, and high-speed optical interconnects to measure acoustic emission event data related to structural failure. A micron-level dual-element micromachined cantilever beam architecture design is described which incorporates conformal on-chip polyimide optical waveguide interconnects to optically sense structural integrity acoustic parameters and route optical power to the sensor assembly. High-speed optical interconnects are used to transfer sensor data to avionic interfaces for debrief and detailed analysis. A detailed design of the optical waveguide sensor design and the significant payoffs and benefits of these sensors are discussed.

Citation Download Citation

Jeffrey N. Schoess and J. David Zook "Conformal acoustic waveguide sensor development", Proc. SPIE 1918, Smart Structures and Materials 1993: Smart Sensing, Processing, and Instrumentation, (12 July 1993); https://doi.org/10.1117/12.148010

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available