Room-temperature InGaAs camera for NIR imaging

Marshall J. Cohen; Gregory H. Olsen

doi:10.1117/12.158695

20 October 1993 Room-temperature InGaAs camera for NIR imaging

Marshall J. Cohen, Gregory H. Olsen

Proceedings Volume 1946, Infrared Detectors and Instrumentation; (1993) https://doi.org/10.1117/12.158695
Event: Optical Engineering and Photonics in Aerospace Sensing, 1993, Orlando, FL, United States

Abstract

A room temperature camera based on a 128 X 128 pixel InGaAs focal plane array (FPA) is described. The photodiode array (PDA) was a backside-illuminated device with an In_.53Ga_.47As epitaxial active layer deposited on an InP substrate. The PDA was bump- bonded to a silicon CMOS readout multiplexer. The FPA was sensitive from below 0.9 micrometers (the cutoff of the substrate) to 1.7 micrometers (the bandgap of the active layer). At room temperature, the mean detectivity of the FPA, D^*_(lambda pk), exceeded 10¹³ cm-(root)Hz/W and increased to 3.5 X 10¹⁴ cm-(root)Hz/W when cooled to 230 K. Potential applications for this wavelength band are discussed.

Citation Download Citation

Marshall J. Cohen and Gregory H. Olsen "Room-temperature InGaAs camera for NIR imaging", Proc. SPIE 1946, Infrared Detectors and Instrumentation, (20 October 1993); https://doi.org/10.1117/12.158695

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available