Combined scanning optical and force microscope using interferometric detection

Christopher David Wright; Warwick W. Clegg; S. T. Cheng; P. J. Crozier; M. J. Cunningham; E. W. Hill; Kazuhiko Hayashi; J. K. Birtwistle

doi:10.1117/12.172606

1 March 1994 Combined scanning optical and force microscope using interferometric detection

Christopher David Wright, Warwick W. Clegg, S. T. Cheng, P. J. Crozier, M. J. Cunningham, E. W. Hill, Kazuhiko Hayashi, J. K. Birtwistle

Author Affiliations +

Proceedings Volume 2004, Interferometry VI: Applications; (1994) https://doi.org/10.1117/12.172606
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

The design and application of scanning probe microscope primarily intended for topographic, magnetic force and magneto-optical investigations of magnetic thin films is described. A microfabricated silicon tip is scanned across the sample of interest, and the tip deflection detected using a modified form of the den Boef twin beam interferometric system. Initial studies of the recorded bit structure in magnetic and magneto-optic storage media, and the magnetic field from a thin film recording head are reported.

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Christopher David Wright, Warwick W. Clegg, S. T. Cheng, P. J. Crozier, M. J. Cunningham, E. W. Hill, Kazuhiko Hayashi, and J. K. Birtwistle "Combined scanning optical and force microscope using interferometric detection", Proc. SPIE 2004, Interferometry VI: Applications, (1 March 1994); https://doi.org/10.1117/12.172606

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