Interferometer with phase modulation for displacement sensor testing

Alexander A. Andreev; Lev N. Butenko; Alexander G. Seregin; Ilya Sh. Etsin

doi:10.1117/12.183151

10 August 1994 Interferometer with phase modulation for displacement sensor testing

Alexander A. Andreev, Lev N. Butenko, Alexander G. Seregin, Ilya Sh. Etsin

Proceedings Volume 2097, Laser Applications; (1994) https://doi.org/10.1117/12.183151
Event: Laser Optics, 1993, St. Petersburg, Russian Federation

Abstract

Phase modulation interferometer with the phase difference computed from the ratio of the first and second harmonics amplitudes has been developed. Signal distortions and deviations of measuring conditions against normal conditions are analyzed and appropriate corrections are made. The instrumental error of small displacement measurements is equal to +/- 0.8 nm (0.95). The digital readout interval is of 1 nm.

Citation Download Citation

Alexander A. Andreev, Lev N. Butenko, Alexander G. Seregin, and Ilya Sh. Etsin "Interferometer with phase modulation for displacement sensor testing", Proc. SPIE 2097, Laser Applications, (10 August 1994); https://doi.org/10.1117/12.183151

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