Development of an automatic precision positioner

Shunian Yang; Zhen-Gao Xu; Zhu Li; Jiabi Chen; Tao Chen

doi:10.1117/12.156464

22 September 1993 Development of an automatic precision positioner

Shunian Yang, Zhen-Gao Xu, Zhu Li, Jiabi Chen, Tao Chen

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156464
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

The measuring technique of focus shift is adopted in the automatic precision positioner developed by the authors based on the principle of astigmatism. According to the specific result measured a control circuit and a high-precision actuator are designed for the moving-positioning of the positioner. The positioner has been used successfully in a focusing system of an optical instrument. Key words : astigmatism focus shift position detection precision displacing mechanism

Citation Download Citation

Shunian Yang, Zhen-Gao Xu, Zhu Li, Jiabi Chen, and Tao Chen "Development of an automatic precision positioner", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156464

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