Grating technology for topography measurement of curved surfaces

Xiangqian Jiang; Tie-Bang Xie; Cai-Xian Yao; Zhu Li

doi:10.1117/12.156502

22 September 1993 Grating technology for topography measurement of curved surfaces

Xiangqian Jiang, Tie-Bang Xie, Cai-Xian Yao, Zhu Li

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156502
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

In this paper a new grating technology for topography measurement of the curved surface is described. It adopts a laser-grating interferometry sensing system whose standard depends on the RCHD grating constant. The optical principle and system characteristics are discussed in detail. The results of principle experiment are given. Key words: Topography measurement of curved surface laser-grating interferometry sensing system grating interferometry reflective cylindric holographic diffractive (RCHD) grating

Citation Download Citation

Xiangqian Jiang, Tie-Bang Xie, Cai-Xian Yao, and Zhu Li "Grating technology for topography measurement of curved surfaces", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156502

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