Method of visual photoelectric intelligent inspection for microgeometrical parameters of surface

Yong-Dong Pan; Dong-Sheng Li; Guang-Quan Wang

doi:10.1117/12.156301

22 September 1993 Method of visual photoelectric intelligent inspection for microgeometrical parameters of surface

Yong-Dong Pan, Dong-Sheng Li, Guang-Quan Wang

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156301
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

This article expounds the principle and constitution of the visual and intelligent detecting system of geometrical parameters in the microscopic view. This system is used mainly on manufactory site. It fits in with the micro geometrical parameters detecting on all sorts of planes and curved surfaces such as the depth and width of furrow the surface degree of roughness etc. This system consists of mechanical part optical part photographic sensing unit and chip microprocessors. The function of mechanical part is pointing allocation adsorption adjusting the focal length and scanning on the plate of all sorts of planes and curved surfaces. The principle of optical part is parting with light. The flaw on the surface of the plate which is detected will be amplified and imaged on the focal plane of the objector in the reflect light path. CCD photographic sensing unit will change the flaw of the image to digital electrical signal. The function of microprocessor system is image recognition and diagnoses. This article expounds emphatically the theory and technology on the engagement of the optical peculiarity focal plane fuzzy recognition and compensation. On the basis of common image processing this detecting instrument uses the technology of background separation gate circuit trigger highspeed S/H circuit parallel AID change and the software of image processing makes use of not only the technology of space and frequency domain and the modularity constitution but

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Yong-Dong Pan, Dong-Sheng Li, and Guang-Quan Wang "Method of visual photoelectric intelligent inspection for microgeometrical parameters of surface", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156301

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KEYWORDS

Optical inspection

Visualization

Charge-coupled devices

Inspection

Microscopes

Data processing

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